Hydrophobic plasma polymerized hexamethyldisilazane thin films: characterization and uses
نویسندگان
چکیده
منابع مشابه
Plasma Polymerized Thin Films Materials: Synthesis, Characterization, and Application Tests
Organic–inorganic hybrid co-polymer thin films were deposited on silicon(100) substrates under the several ratio of TEOS (tetraethoxysilane) against cyclohexene by plasma enhanced chemical vapour deposition (PECVD) method. Toluene and TEOS were utilized as organic and inorganic precursors each, and hydrogen and argon were also used as a bubbler and carrier gases, respectively. In order to compa...
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ژورنال
عنوان ژورنال: Materials Research
سال: 2006
ISSN: 1516-1439
DOI: 10.1590/s1516-14392006000100003